Material: Silicon Nitride Geometry: Rectangular & Triangular Cantilevers Number: 6 Cantilever Thickness (Nom): 0.515 µm Cantilever Thickness (RNG): 0.485 - 0.545 µm Back Side Coating: Reflective Gold Top Layer Back: 45 ± 5 nm of Ti/Au
Shape Resonant Freq. kHz Spring Const. N/m Length µm Width µm Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. Nom. Min. Max. A Triangular 22 15 30 0.07 0.025 0.14 170 165 175 22 17 27 B Rectangular 15 10 20 0.02 0.005 0.04 200 195 205 20 15 25 C Triangular 7 4 10 0.01 0.005 0.02 300 295 305 20 15 25 D Triangular 15 10 20 0.03 0.01 0.06 215 210 220 20 15 25 E Triangular 38 26 50 0.1 0.05 0.2 130 125 135 18 13 23 F Triangular 125 90 160 0.6 0.3 1.2 75 70 80 18 13 23
规格参数
